[IEEE LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - Newport, RI, USA (21-24 April 1992)] LEOS 1992 Summer Topical Meeting Digest on Broadband Analog and Digital Optoelectronics, Optical Multiple Access Networks, Integrated Optoelectronics, and Smart Pixels - Thin film dielectric deposition by rapid thermal CVD for InP device applications
Lebland, F., Licoppe, C., Nissim, Y.I.Year:
1992
DOI:
10.1109/iciprm.1992.235552
File:
PDF, 288 KB
1992