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[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - Membrane sieve using stoichiometric and stress-reduced SiN/SiO/SiN multilayer films and applications to plasma separation
Lee, Dae-Sik, Choi, Yo Han, Jun, Mun Yeon, Han, Yong Duk, Yoon, Hyun C., Shoji, ShuichiYear:
2012
Language:
english
DOI:
10.1109/icsens.2012.6411404
File:
PDF, 525 KB
english, 2012