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[IEEE 2011 International Conference on Electric Information and Control Engineering (ICEICE) - Wuhan, China (2011.04.15-2011.04.17)] 2011 International Conference on Electric Information and Control Engineering - Design and realization of grating target coordinate sensors
Cao Yong,, Shao Sijie,, Zhang Yu,, Xiong Wei,Year:
2011
Language:
english
DOI:
10.1109/iceice.2011.5778326
File:
PDF, 301 KB
english, 2011