[IEEE 30th International Conference on Plasma Science - Jeju, South Korea (2-5 June 2003)] The 30th International Conference on Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. - Optical spectroscopy of CH/sub 4//H/sub 2/ and C/sub 2/H/sub 2//H/sub 2/ plasma generated in an RF planar coil inductively coupled plasma system used for CVD diamond deposition

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