[IEEE IEEE Sensors, 2005. - Irvine, CA, USA (Oct. 31,...

  • Main
  • [IEEE IEEE Sensors, 2005. - Irvine, CA,...

[IEEE IEEE Sensors, 2005. - Irvine, CA, USA (Oct. 31, 2005)] IEEE Sensors, 2005. - Fused Silica as Substrate Material for Surface Micromachined Capacitive Pressure Sensors Operable in Touch-Mode

Schary, T., Meiners, M., Lang, W., Benecke, W.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2005
Language:
english
DOI:
10.1109/icsens.2005.1597940
File:
PDF, 1.31 MB
english, 2005
Conversion to is in progress
Conversion to is failed