[IEEE IEEE Sensors, 2005. - Irvine, CA, USA (Oct. 31, 2005)] IEEE Sensors, 2005. - Fused Silica as Substrate Material for Surface Micromachined Capacitive Pressure Sensors Operable in Touch-Mode
Schary, T., Meiners, M., Lang, W., Benecke, W.Year:
2005
Language:
english
DOI:
10.1109/icsens.2005.1597940
File:
PDF, 1.31 MB
english, 2005