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[IEEE 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) - Effect of N2 addition on species kinetics in hydrogen and methane based inductively coupled pulsed plasmas
Jacq, S, Cardinaud, C, Le Brizoual, L, Granier, AYear:
2013
Language:
english
DOI:
10.1109/plasma.2013.6635040
File:
PDF, 115 KB
english, 2013