[IEEE International Semiconductor Device Research Symposium, 2003 - Washington, DC, USA (Dec. 10-12, 2003)] International Semiconductor Device Research Symposium, 2003 - Compositional pulling effect in high Al-content AlGaN films grown on (0001) sapphire substrates
Yu-Li Tsai,, Cheng-Liang Wang,, Po-Hung Lin,, Wei-Tsai Liao,, Jyh-Rong Gong,Year:
2003
Language:
english
DOI:
10.1109/isdrs.2003.1272013
File:
PDF, 89 KB
english, 2003