Improved on-axis DC magnetron sputtering for large-area...

IEEE Transactions on Appiled Superconductivity 1993 / 3 Vol. 3; Iss. 1

Improved on-axis DC magnetron sputtering for large-area deposition of YBa/sub 2/Cu/sub 3/O/sub 7/-films

Kruger, U., Kutzner, R., Wordenweber, R.
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Volume:
3
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/77.233917
Date:
March, 1993
File:
PDF, 428 KB
english, 1993
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