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[IEEE 2006 International Microsystems, Package, Assembly Conference Taiwan - Grand Formosa Regent, Taipei, Taiwan (2006.10.18-2006.10.20)] 2006 International Microsystems, Package, Assembly Conference Taiwan - Nanoindentation-induced Phase Transformation of Silicon
Yang, Ping-feng, Jian, Sheng-rui, Lai, Yi-shao, Chen, Tsan-hsien, Chen, Rong-shengYear:
2006
Language:
english
DOI:
10.1109/impact.2006.312204
File:
PDF, 2.94 MB
english, 2006