[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - CMUT-in-CMOS ultrasonic transducer arrays with on-chip electronics
Cheng, X., Lemmerhirt, D. F., Kripfgans, O. D., Zhang, M., Yang, C., Rich, C. A., Fowlkes, J. B.Year:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285878
File:
PDF, 1.88 MB
english, 2009