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[IEEE 2006 IEEE MTT-S International Microwave Symposium Digest - San Francisco, CA (2006.06.11-2006.06.16)] 2006 IEEE MTT-S International Microwave Symposium Digest - High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters
Ayazi, Farrokh, Pourkamali, Siavash, Ho, Gavin, Abdolvand, RezaYear:
2006
Language:
english
DOI:
10.1109/mwsym.2006.249705
File:
PDF, 4.16 MB
english, 2006