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[IEEE 2007 American Control Conference - New York, NY, USA (2007.07.9-2007.07.13)] 2007 American Control Conference - Robust Control for Linear Stages in Electronic Manufacturing
Quintanilla, Rafael, Wen, John T., Arcak, Murat, Frankel, Joe, Peeples, Mark, Unrath, MarkYear:
2007
Language:
english
DOI:
10.1109/acc.2007.4282545
File:
PDF, 401 KB
english, 2007