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[IEEE Instruments (ICEMI) - Beijing, China (2009.08.16-2009.08.19)] 2009 9th International Conference on Electronic Measurement & Instruments - Research of micro-positioning system based on piezoelectric actuator
Wang, Xuanze, Chu, Yufen, Zhai, ZhongshengYear:
2009
Language:
english
DOI:
10.1109/icemi.2009.5274259
File:
PDF, 188 KB
english, 2009