[IEEE 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics - Banff, AB, Canada (2012.08.6-2012.08.9)] 2012 International Conference on Optical MEMS and Nanophotonics - A stiffness-defined silicon plane bending method to realize perfectly-curved surface formation for tunable parabolic mirrors
Binh, Tran Nam, Morishita, Satoshi, Kubota, Masanori, Mita, YoshioYear:
2012
Language:
english
DOI:
10.1109/omems.2012.6318802
File:
PDF, 717 KB
english, 2012