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Effect of Mesa Shape on Threading Dislocation Density in Ge Epitaxial Layers on Si after Post-Growth Annealing
Takada, Yoichi, Osaka, Jiro, Ishikawa, Yasuhiko, Wada, KazumiVolume:
49
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.49.04dg23
Date:
April, 2010
File:
PDF, 277 KB
english, 2010