[IEEE 2000 IEEE MTT-S International Microwave Symposium...

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[IEEE 2000 IEEE MTT-S International Microwave Symposium Digest - Boston, MA, USA (11-16 June 2000)] 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017) - Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

Veijola, T., Mattila, T., Jaakkola, O., Kiihamaki, J., Lamminmaki, T., Oja, A., Ruokonen, K., Seppa, H., Seppala, P., Tittonen, I.
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Volume:
1
Year:
2000
Language:
english
DOI:
10.1109/mwsym.2000.860894
File:
PDF, 373 KB
english, 2000
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