[IEEE IEEE Conference Record - Abstracts. 2005 IEEE...

  • Main
  • [IEEE IEEE Conference Record -...

[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Intrinsic Stress of DLC Film Prepared by RF Plasma CVD and Filteredcathodic ARC PVD

Ha, Peter C.T., McKenzie, D.R., Bilek, M.M.M., Doyle, E.D., Chu, P.K.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2005
Language:
english
DOI:
10.1109/plasma.2005.359498
File:
PDF, 1.31 MB
english, 2005
Conversion to is in progress
Conversion to is failed