Integration of CMOS-electronics and particle detector diodes in high-resistivity silicon-on-insulator wafers
Dierickx, B., Wouters, D., Willems, G., Alaerts, A., Debusschere, I., Simoen, E., Vlummens, J., Akimoto, H., Claeys, C., Maes, H., Hermans, L., Heijne, E.H.M., Jarron, P., Anghinolfi, F., Campbell, M.Volume:
40
Language:
english
Journal:
IEEE Transactions on Nuclear Science
DOI:
10.1109/23.256656
Date:
January, 1993
File:
PDF, 538 KB
english, 1993