[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor...

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[IEEE 2010 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - San Francisco, CA, USA (2010.07.11-2010.07.13)] 2010 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Navigating in the density plane – achieving flat wafer surface and uniform metal thickness in CMP processes

Melzner, Hanno, Cui, Ning, Postnikov, Sergei
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Year:
2010
Language:
english
DOI:
10.1109/asmc.2010.5551446
File:
PDF, 953 KB
english, 2010
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