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Experimental Characterization of Dual-Frequency Capacitively Coupled Plasma with Inductive Enhancement in Argon
Bai, Yang, Jin, Chenggang, Yu, Tao, Wu, Xuemei, Zhuge, Lanjian, Ning, Zhaoyuan, Ye, Chao, Ge, ShuibingVolume:
15
Language:
english
Journal:
Plasma Science and Technology
DOI:
10.1088/1009-0630/15/10/08
Date:
October, 2013
File:
PDF, 2.57 MB
english, 2013