[IEEE 32nd IEEE Conference on Decision and Control - San...

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[IEEE 32nd IEEE Conference on Decision and Control - San Antonio, TX, USA (15-17 Dec. 1993)] Proceedings of 32nd IEEE Conference on Decision and Control - Real-time control of reactive ion etching: identification and disturbance rejection

Rashap, B.A., Khargonekar, P.P., Grizzle, J.W., Elta, M.E., Freudenberg, J.S., Terry, F.L.
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Year:
1993
Language:
english
DOI:
10.1109/cdc.1993.325839
File:
PDF, 624 KB
english, 1993
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