[IEEE 32nd IEEE Conference on Decision and Control - San Antonio, TX, USA (15-17 Dec. 1993)] Proceedings of 32nd IEEE Conference on Decision and Control - Real-time control of reactive ion etching: identification and disturbance rejection
Rashap, B.A., Khargonekar, P.P., Grizzle, J.W., Elta, M.E., Freudenberg, J.S., Terry, F.L.Year:
1993
Language:
english
DOI:
10.1109/cdc.1993.325839
File:
PDF, 624 KB
english, 1993