Optimization of a plasma focus device as an electron beam...

Plasma Sources Science and Technology 2007 / 05 Vol. 16; Iss. 2

Optimization of a plasma focus device as an electron beam source for thin film deposition

Zhang, T, Lin, J, Patran, A, Wong, D, Hassan, S M, Mahmood, S, White, T, Tan, T L, Springham, S V, Lee, S, Lee, P, Rawat, R S
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Volume:
16
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/16/2/006
Date:
May, 2007
File:
PDF, 632 KB
english, 2007
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