[IEEE 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) - San Francisco, CA, USA (2011.05.2-2011.05.5)] 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) Proceedings - GaN: A multifunctional material enabling MEMS resonators based on amplified piezoelectric detection

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