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[IEEE IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th International Conference - Monterey, CA, USA (20-24 June 1999)] IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) - Second harmonic RF currents in a cylindrical ICP with a planar coil
Godyak, V.A., Piejak, R.B., Alexandrovich, B.M.Year:
1999
Language:
english
DOI:
10.1109/plasma.1999.829321
File:
PDF, 105 KB
english, 1999