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[IEEE ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science - New Orleans, LA, USA (4-7 June 2000)] ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) - A study on gas desorption from inductively coupled plasma chamber wall by optical emission spectroscopy method
Shafiul, A.A.B.M., Shuyan Xu,, Yin-An Li,Year:
2000
Language:
english
DOI:
10.1109/plasma.2000.854555
File:
PDF, 84 KB
english, 2000