A motor-piezo actuator for nano-scale positioning based on...

Journal of Micromechanics and Microengineering 2003 / 03 Vol. 13; Iss. 2

A motor-piezo actuator for nano-scale positioning based on dual servo loop and nonlinearity compensation

Liu, Hongzhong, Lu, Bingheng, Ding, Yucheng, Tang, Yiping, Li, Dichen
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/2/318
Date:
March, 2003
File:
PDF, 140 KB
english, 2003
Conversion to is in progress
Conversion to is failed