Formation of microstructured silicon surfaces by electrochemical etching using colloidal crystal as mask
Hidetaka Asoh, Akihiko Oide, Sachiko OnoVolume:
8
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.elecom.2006.08.021
File:
PDF, 1.41 MB
english, 2006