Instabilities in Capacitively Coupled Radio-Frequency...

IEEE Transactions on Plasma Science 2008 / 08 Vol. 36; Iss. 4

Instabilities in Capacitively Coupled Radio-Frequency Discharges

Schulze, J., Luggenholscher, D., Czarnetzki, U.
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Volume:
36
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2008.923829
Date:
August, 2008
File:
PDF, 277 KB
english, 2008
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