POLYMER-ASSISTED MOD PREPARATION OF PbZr...

Integrated Ferroelectrics 2006 / 11 Vol. 84; Iss. 1

POLYMER-ASSISTED MOD PREPARATION OF PbZr 0.52 Ti 0.48 O 3 THICK FILMS FOR MEMS APPLICATIONS

LIN, PENG, REN, WEI, WU, XIAOQING, SHI, PENG, YAO, XI
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Volume:
84
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580601085255
Date:
November, 2006
File:
PDF, 633 KB
english, 2006
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