Ion energy distributions measured inside a high-voltage...

Plasma Sources Science and Technology 2012 / 12 Vol. 21; Iss. 6

Ion energy distributions measured inside a high-voltage cathode in a BF 3 pulsed dc plasma used for plasma doping: experiments and ab initio calculations

Godet, Ludovic, Radovanov, Svetlana, Sheuer, Jay, Cardinaud, Christophe, Fernandez, Nicolas, Ferro, Yves, Cartry, Gilles
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Volume:
21
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/21/6/065006
Date:
December, 2012
File:
PDF, 1.66 MB
english, 2012
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