Flexible, dry-released process for aluminum electrostatic...

Journal of Microelectromechanical Systems 1994 / Sept. Vol. 3; Iss. 3

Flexible, dry-released process for aluminum electrostatic actuators

Storment, C.W., Borkholder, D.A., Westerlind, V., Suh, J.W., Maluf, N.I., Kovacs, G.T.A.
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Volume:
3
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/84.311558
Date:
January, 1994
File:
PDF, 916 KB
english, 1994
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