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[IEEE 2005 IEEE International Conference on Mechatronics - Taipei, Taiwan (10-12 July 2005)] IEEE International Conference on Mechatronics, 2005. ICM '05. - Analysis and improvement of dynamic characteristic of 3-axis nano stage

Choong Kim,, Kang-Nyung Lee,, Dong-Ju Lee,, No-Cheol Park,, Young-Pil Park,, Jung-Woo Park,, Dong-Jin Lee,, Moon Gu Lee,, Hyoung Gil Choi,, Suk-Won Lee,
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Year:
2005
Language:
english
DOI:
10.1109/icmech.2005.1529223
File:
PDF, 758 KB
english, 2005
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