[IEEE 2013 Transducers & Eurosensors XXVII: The 17th...

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - A low-temperature parylene-C-to-silicon bonding using photo-patternable adhesives and its applications

Chang, Jay Han-Chieh, Liu, Yang, Tai, Yu-Chong

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Year:

2013

Language:

english

DOI:

10.1109/transducers.2013.6627244

File:

PDF, 2.15 MB

english, 2013

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