Potassium sorbate solutions as copper chemical mechanical...

Electrochimica Acta 2007 Vol. 52; Iss. 16

Potassium sorbate solutions as copper chemical mechanical planarization (CMP) based slurries

Esta Abelev, Andrew Jonathan Smith, Achim Walter Hassel, Yair Ein-Eli
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Volume:
52
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.electacta.2007.02.010
File:
PDF, 1.10 MB
english, 2007
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