Graphoepitaxial Directed Self-Assembly of Polystyrene- Block -Polydimethylsiloxane Block Copolymer on Substrates Functionalized with Hexamethyldisilazane to Fabricate Nanoscale Silicon Patterns
Borah, Dipu, Rasappa, Sozaraj, Senthamaraikannan, Ramsankar, Holmes, Justin D., Morris, Michael A.Volume:
1
Language:
english
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201300102
Date:
June, 2014
File:
PDF, 15.77 MB
english, 2014