[IEEE 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems (MEMS) - Cancun, Mexico (2011.01.23-2011.01.27)] 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems - An electrochemical-cantilever platform for hybrid sensing applications
Fischer, Lee MacKenzie, Dohn, Soren, Boisen, Anja, Tenje, MariaYear:
2011
Language:
english
DOI:
10.1109/memsys.2011.5734554
File:
PDF, 1.77 MB
english, 2011