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[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - The Influence of Support Structure Pattern to the Flatness of Reflector Moving Grating Light Modulator
jie, Zhang, shanglian, Huang, xu, Yan, lei, Han, yi, Wu, zhihai, ZhangYear:
2006
Language:
english
DOI:
10.1109/nems.2006.334746
File:
PDF, 4.77 MB
english, 2006