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End-point detection of copper super-filling in small features under a potentiostatic mode of operation
David Starosvetsky, Nina Sezin, Mark Kovler, Yair Ein-EliVolume:
53
Year:
2008
Language:
english
Pages:
6
DOI:
10.1016/j.electacta.2008.05.065
File:
PDF, 939 KB
english, 2008