Growth of multioxide planar film with the nanoscale inner structure via anodizing Al/Ta layers on Si
A. Mozalev, A.J. Smith, S. Borodin, A. Plihauka, A.W. Hassel, M. Sakairi, H. TakahashiVolume:
54
Year:
2009
Language:
english
Pages:
11
DOI:
10.1016/j.electacta.2008.08.030
File:
PDF, 1.80 MB
english, 2009