[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - On-line extraction for thermal conductivity of surface-micromachined polysilicon thin films
GaoBin Xu,, Qing-An Huang,Year:
2004
Language:
english
DOI:
10.1109/icsens.2004.1426496
File:
PDF, 454 KB
english, 2004