[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27,...

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[IEEE IEEE Sensors, 2004. - Vienna, Austria (Oct. 24 - 27, 2004)] Proceedings of IEEE Sensors, 2004. - On-line extraction for thermal conductivity of surface-micromachined polysilicon thin films

GaoBin Xu,, Qing-An Huang,
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Year:
2004
Language:
english
DOI:
10.1109/icsens.2004.1426496
File:
PDF, 454 KB
english, 2004
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