[IEEE 2013 IEEE International Conference on Automation Science and Engineering (CASE 2013) - Madison, WI, USA (2013.08.17-2013.08.20)] 2013 IEEE International Conference on Automation Science and Engineering (CASE) - Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes
Susto, Gian Antonio, Johnston, Adrian B., O'Hara, Paul G., McLoone, SeanYear:
2013
Language:
english
DOI:
10.1109/coase.2013.6653980
File:
PDF, 468 KB
english, 2013