A Wavelet-Based Approach in Detecting Visual Defects on...

IEEE Transactions on Semiconductor Manufacturing 2010 / 05 Vol. 23; Iss. 2

A Wavelet-Based Approach in Detecting Visual Defects on Semiconductor Wafer Dies

Chi-Hao Yeh,, Ful-Chiang Wu,, Wei-Lung Ji,, Chien-Yi Huang,
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Volume:
23
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/tsm.2010.2046108
Date:
May, 2010
File:
PDF, 2.97 MB
english, 2010
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