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[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Study on Chemical Mechanical Polishing of GeSbTe for Chalcogenide Phase Change Memory
Zhanga, Kai-liang, Liua, Qi-bin, Songa, Zhi-tang, Fenga, Song-lin, Chenb, BomyYear:
2006
Language:
english
DOI:
10.1109/icsict.2006.306518
File:
PDF, 192 KB
english, 2006