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[IEEE 2006 19th International Vacuum Nanoelectronics Conference - Lijiang Waterfall Hotel, Guilin, China (2006.07.17-2006.07.20)] 2006 19th International Vacuum Nanoelectronics Conference - New Strategies for Improvement and Implementation of the Digital Electrostatic e-beam Array Lithography (DEAL) Concept
Randolph, S.J., Baylor, L.R., Klein, K.L., Gardner, W.L., Kasica, R.J., Guillorn, M.A., Hensley, D.K., Meyer, H.M., Islam, S., Rack, P.D., Rucker, R., Rahman, T., Grundman, T., Bigelow, T., Eliza, S.AYear:
2006
Language:
english
DOI:
10.1109/ivnc.2006.335410
File:
PDF, 157 KB
english, 2006