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[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Gate Work Function and Contact Engineering in Nanoscale Vertical Pillar Transistor for DRAM Cell Transistors
Jeong, Min-Kyu, Park, Ki-Heung, Kim, Young Min, Lee, Jong-HoYear:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456130
File:
PDF, 929 KB
english, 2007