[IEEE IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings - Cambridge, MA, USA (12-14 Nov. 1996)] IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings - HDP dielectric BEOL gapfill: a process for manufacturing
Broomfield, M.C., Spooner, T.A.Year:
1996
Language:
english
DOI:
10.1109/asmc.1996.558013
File:
PDF, 1.17 MB
english, 1996