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[IEEE 2005 International Semiconductor Device Research Symposium - Bethesda, Maryland, USA (Dec. 7-9, 2005)] 2005 International Semiconductor Device Research Symposium - The Effects of Implanting Al and Al and C at Different Temperatures in Different Concentrations into SiC
Stepp, D., Jones, K.A., Zheleva, T.S., Derenge, M.A., Vispute, R.D., Hullavarad, S., Dar, S.Year:
2005
Language:
english
DOI:
10.1109/isdrs.2005.1596103
File:
PDF, 260 KB
english, 2005