Deep implants for semiconductor device applications

Radiation Effects and Defects in Solids 1996 / 01 Vol. 140; Iss. 1

Deep implants for semiconductor device applications

Frey, L., Bogen, S., Herden, M., Ryssel, H.
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Volume:
140
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420159608212943
Date:
January, 1996
File:
PDF, 921 KB
english, 1996
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