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[IEEE 2011 IEEE International Reliability Physics Symposium (IRPS) - Monterey, CA, USA (2011.04.10-2011.04.14)] 2011 International Reliability Physics Symposium - Mechanistic understanding of Breakdown and Bias Temperature Instability in High-K Metal devices using inline Fast Ramped Bias Test
Krishnan, Siddarth A., Cartier, Eduard, Stathis, James, Chudzik, Michael, Kerber, AndreasYear:
2011
Language:
english
DOI:
10.1109/irps.2011.5784504
File:
PDF, 251 KB
english, 2011