Molecular ion implantation into silicon

Radiation Effects and Defects in Solids 1990 / 05 Vol. 114; Iss. 1-2

Molecular ion implantation into silicon

Mukashev, B. N., Smirnov, V. V., Kalbitzer, S., Weiser, M., Börret, R., Behar, M.
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Volume:
114
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420159008213078
Date:
May, 1990
File:
PDF, 491 KB
english, 1990
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